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Tungsten Heaters in Semiconductor MOCVD Device

 They are used as a component of semiconductor MOCVD system.

keyword:

PRODUCT DETAILS


Application:

 They are used as a component of semiconductor MOCVD system.

 

Product Processing Accuracy Parameters:

 

Main Materials

Processing

Range

Dimensional Accuracy

(mm)

Shape Accuracy

(mm)

Position Accuracy(mm)

Finish

(Ra,μm)

W

0.00-5.00

±0.003

0.01

0.005

0.2-0.4

W

5.01-15.00

±0.005

0.015

0.006

0.4

W

15.01-30

±0.008

0.02

0.007

0.4

W

30.01-100

±0.010

0.025

0.008

0.6

W

>100

±0.0127

0.030

0.010

0.6

 

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