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High-purity Molybdenum Rotary Target

High- purity molybdenum planar and rotary targets are mainly used in electrode gates and source / drain electrodes in TFT-LCD manufacturing.

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PRODUCT DETAILS


Application:

High- purity molybdenum planar and rotary targets are mainly used in electrode gates and source / drain electrodes in TFT-LCD manufacturing.

Product Property Parameters:

 

Chemical Compositions

Main Content, %, min

Mo

99.95

99.97

Impurity Content

(mass fraction), %, max

Al

0.0050

0.0010

Ca

0.0020

0.0020

Cr

0.0100

0.0020

Cu

0.0020

0.0020

Fe

0.0050

0.0020

K

-

0.0020

Mg

0.0020

0.0010

Na

-

0.0010

Ni

0.0050

0.0010

Si

0.0050

0.0020

W

0.0300

0.0300

S

0.0050

-

Cd

0.0001

-

C

0.0100

0.0030

O

0.0080

0.0040

N

0.0030

0.0010

Note: Molybdenum content is the sum of 100% minus the measured content of impurity elements listed in the table (excluding gas elements). Special requirements will be agreed upon by the supplier and buyer, and indicated in the contract or purchase order.

 

Other Properties:

 

Grade

Density

(g/cm3)

Average Grain Size

(μm)

Roughness

(μm)

Flatness

(mm)

Bonding Rate

Mo

≥10.15

≤100

≤0.8

≤0.30

≥98%

 

Size:

 

 

Shape

 

(mm)

 

 

 

 

 

 

 

Planar

G2.5

710*630*8

G 4.5

1200*1130*12

G5

1700*1431*12

G5.5

1950*1580*16

G6

 

2300*1800*14

 

2300*190*16

G8.5

2650*210*18

G10.5

3430*200*20

 

Rotary

G6

φ135/167*2158

G8.5

φ135/167*2692

 

Note: Special requirements will be agreed upon by the supplier and buyer.

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Product Application Fields