High-purity Molybdenum Rotary Target
Classification :
keyword:
PRODUCT DETAILS
Application:
High- purity molybdenum planar and rotary targets are mainly used in electrode gates and source / drain electrodes in TFT-LCD manufacturing.
Product Property Parameters:
|
Chemical Compositions |
|||
|
Main Content, %, min |
Mo |
99.95 |
99.97 |
|
Impurity Content (mass fraction), %, max |
Al |
0.0050 |
0.0010 |
|
Ca |
0.0020 |
0.0020 |
|
|
Cr |
0.0100 |
0.0020 |
|
|
Cu |
0.0020 |
0.0020 |
|
|
Fe |
0.0050 |
0.0020 |
|
|
K |
- |
0.0020 |
|
|
Mg |
0.0020 |
0.0010 |
|
|
Na |
- |
0.0010 |
|
|
Ni |
0.0050 |
0.0010 |
|
|
Si |
0.0050 |
0.0020 |
|
|
W |
0.0300 |
0.0300 |
|
|
S |
0.0050 |
- |
|
|
Cd |
0.0001 |
- |
|
|
C |
0.0100 |
0.0030 |
|
|
O |
0.0080 |
0.0040 |
|
|
N |
0.0030 |
0.0010 |
|
|
Note: Molybdenum content is the sum of 100% minus the measured content of impurity elements listed in the table (excluding gas elements). Special requirements will be agreed upon by the supplier and buyer, and indicated in the contract or purchase order. |
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Other Properties:
|
Grade |
Density (g/cm3) |
Average Grain Size (μm) |
Roughness (μm) |
Flatness (mm) |
Bonding Rate |
|
Mo |
≥10.15 |
≤100 |
≤0.8 |
≤0.30 |
≥98% |
Size:
|
Shape |
(mm) |
|
|
Planar |
G2.5 |
710*630*8 |
|
G 4.5 |
1200*1130*12 |
|
|
G5 |
1700*1431*12 |
|
|
G5.5 |
1950*1580*16 |
|
|
G6
|
2300*1800*14 |
|
|
2300*190*16 |
||
|
G8.5 |
2650*210*18 |
|
|
G10.5 |
3430*200*20 |
|
|
Rotary |
G6 |
φ135/167*2158 |
|
G8.5 |
φ135/167*2692 |
Note: Special requirements will be agreed upon by the supplier and buyer.
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