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High-purity Tungsten Targets

It is used as a filler for through holes (Vias) between metal layers and vertical contact holes (contact), i.e. tungsten plug.

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PRODUCT DETAILS


Application:

It is used as a filler for through holes (Vias) between metal layers and vertical contact holes (contact), i.e. tungsten plug.

 

Product Processing Accuracy Parameters:

 

Chemical Compositions

Main Content, %, min

W

99.99

99.999

Impurity Content

(mass fraction), %, max

Al

0.0001

0.0001

B

-

0.00001

Bi

0.0001

0.00001

Ca

0.0005

0.00005

Co

0.0001

0.00005

Cr

0.0002

0.0001

Cu

0.0002

0.0001

F

-

0.00001

Fe

0.0010

0.0001

K

0.0001

0.00001

Li

-

0.00005

Mg

0.0001

-

Mn

0.00005

0.00005

Mo

0.0010

-

Na

0.0002

0.00001

Ni

0.0002

0.0001

Pb

0.0003

0.00001

Si

0.0010

0.00005

Sn

0.0001

0.0001

Th

-

0.00000005

Ti

0.00005

0.00005

U

-

0.00000005

Zr

0.00005

-

Zn

0.0001

0.00005

C

0.0050

0.0050

O

0.0100

0.0100

S

0.0010

≤0.0010

Note: Molybdenum content is the sum of 100% minus the measured content of impurity elements listed in the table (excluding gas elements). Special requirements will be agreed upon by the supplier and buyer, and indicated in the contract or purchase order.

 

Others:

 

Relative Density

Average Grain Size

(μm)

Roughness

(Ra, μm)

Flatness

(mm)

≥99%

≤100

≤0.8

≤1%

 

Size:

 

Shape

Thickness

(mm)

Width

(mm)

Length

(mm)

Diameter

(mm)

Round

3-25

-

-

≤450

Square

3-25

≤600

≤2000

-

 

Note: Special requirements will be agreed upon by the supplier and buyer.

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