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Ion Implantation Parts

They are used to produce parts of the semiconductor ion implanter.

keyword:

PRODUCT DETAILS


Application:

They are used to produce parts of the semiconductor ion implanter.

 

Product Property Parameters:

 

Name

W

Mo

TZM

Density(g/cm3)

19.1

10.15

10.05

 

 

Product Processing Accuracy Parameters:

 

Main Materials

 

Processing

Range

 

Dimensional Accuracy (mm)

 

Shape Accuracy (mm)

 

Position Accuracy (mm)

 

Finish

(Ra,μm)

W

0.00-5.00

±0.003

0.01

0.005

0.2-0.4

W

5.01-15.00

±0.005

0.015

0.006

0.4

W

15.01-30

±0.008

0.02

0.007

0.4

W

30.01-100

±0.010

0.025

0.008

0.6

W

> 100

±0.0127

0.030

0.010

0.6

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