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Tantalum Rings & Tantalum Targets

As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.

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PRODUCT DETAILS


Application:

As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.

Product Property Parameters

Grade

DTa1

DTa2

DTa3

 

 

 

 

Chemical Compositions

(%,max)

Ta

≥99.95

≥99.99

≥99.995

C

0.01

0.003

0.002

N

0.005

0.005

0.004

H

0.0015

0.0015

0.001

O

0.015

0.01

0.005

Nb

0.02

0.005

0.002

Fe

0.005

0.0005

0.0001

Ti

0.002

0.001

0.0005

W

0.005

0.001

0.001

Mo

0.005

0.001

0.001

Si

0.005

0.001

0.0001

Ni

0.002

0.0001

0.0001

 

 

 

 

Other Properties

Average Grain Size

(μm)

≤100μm

 

Roughness

(Ra, μm)

Ra0.8-1.2

Flatness

(mm)

≤0.10%

Sizes:

Shape

Thickness

(mm)

Width

(mm)

Length

(mm)

Diameter

(mm)

Round

3-25

-

-

≤450

Square

3-25

≤600

≤2000

-

Note: Special requirements will be agreed upon by the supplier and buyer.

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Product Application Fields