Tantalum Rings & Tantalum Targets
Classification :
keyword:
PRODUCT DETAILS
Application:
As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.
Product Property Parameters:
|
Grade |
DTa1 |
DTa2 |
DTa3 |
|
|
Chemical Compositions (%,max) |
Ta |
≥99.95 |
≥99.99 |
≥99.995 |
|
C |
0.01 |
0.003 |
0.002 |
|
|
N |
0.005 |
0.005 |
0.004 |
|
|
H |
0.0015 |
0.0015 |
0.001 |
|
|
O |
0.015 |
0.01 |
0.005 |
|
|
Nb |
0.02 |
0.005 |
0.002 |
|
|
Fe |
0.005 |
0.0005 |
0.0001 |
|
|
Ti |
0.002 |
0.001 |
0.0005 |
|
|
W |
0.005 |
0.001 |
0.001 |
|
|
Mo |
0.005 |
0.001 |
0.001 |
|
|
Si |
0.005 |
0.001 |
0.0001 |
|
|
Ni |
0.002 |
0.0001 |
0.0001 |
|
|
Other Properties |
Average Grain Size (μm) |
≤100μm |
||
|
Roughness (Ra, μm) |
Ra0.8-1.2 |
|||
|
Flatness (mm) |
≤0.10% |
|||
Sizes:
|
Shape |
Thickness (mm) |
Width (mm) |
Length (mm) |
Diameter (mm) |
|
Round |
3-25 |
- |
- |
≤450 |
|
Square |
3-25 |
≤600 |
≤2000 |
- |
Note: Special requirements will be agreed upon by the supplier and buyer.
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