Tungsten-Titanium Targets
Classification :
keyword:
PRODUCT DETAILS
Application:
It is used as a diffusion barrier to prevent the diffusion of Al or Cu in Si, and has adhesion to the materials in contact with it.
Product Property Parameters:
|
Chemical Compositions |
||
|
Main Content, % |
W |
89.45~90.45 |
|
Ti |
10±0.5 |
|
|
Impurity Content (mass fraction), %, max |
Fe |
0.0030 |
|
Al |
0.0020 |
|
|
Si |
0.0010 |
|
|
Mg |
0.0010 |
|
|
Ni |
0.0010 |
|
|
Ca |
0.0020 |
|
|
Cu |
0.0010 |
|
|
Pb |
0.0010 |
|
|
Bi |
0.0010 |
|
|
Sn |
0.0010 |
|
|
Sb |
0.0010 |
|
|
As |
0.0010 |
|
|
Mo |
0.0060 |
|
|
P |
0.0020 |
|
|
C |
0.0020 |
|
|
N |
0.0020 |
|
|
O |
0.0020 |
|
|
Note: Molybdenum content is the sum of 100% minus the measured content of impurity elements listed in the table (excluding gas elements). Special requirements will be agreed upon by the supplier and buyer, and indicated in the contract or purchase order. |
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Others:
|
Relative Density |
Average Grain Size (μm) |
Roughness (Ra, μm) |
Flatness (mm) |
|
≥98% |
≤100 |
≤0.8 |
≤1% |
Size:
|
Shape |
Thickness (mm) |
Width (mm) |
Length (mm) |
Diameter (mm) |
|
Round |
3-25 |
- |
- |
≤450 |
Note: Special requirements will be agreed upon by the supplier and buyer.
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